Advanced CMOS manufacturing of superconducting qubits on 300 mm wafers

by | Sep 18, 2024 | Uncategorized | 0 comments

Nature, Published online: 18 September 2024; doi:10.1038/s41586-024-07941-9

Superconducting transmon qubits have been fabricated in a 300 mm complementary metal–oxide–semiconductor (CMOS) pilot line using industrial fabrication methods, achieving relaxation and coherence times exceeding 100 μs.

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